| 000 | 00498nam a2200205Ia 4500 | ||
|---|---|---|---|
| 005 | 20240823053834.0 | ||
| 008 | 240823s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a978-81-8489-413-4 | ||
| 041 | _aENGLISH | ||
| 082 | _A621.381 Q4 | ||
| 100 | _aIvor Brodie | ||
| 245 | 4 | _aThe Physics of Micro/Nano-Fabrication | |
| 250 | _a1st | ||
| 260 |
_c2014 _bSpringer International Ed |
||
| 500 | _aYES | ||
| 650 |
_aPhysics _bPhysics |
||
| 700 | _a Julius J Muray | ||
| 942 | _cBK | ||
| 999 |
_c225071 _d225071 |
||