| 000 | 00440nam a2200169Ia 4500 | ||
|---|---|---|---|
| 005 | 20240823011431.0 | ||
| 008 | 240823s9999||||xx |||||||||||||| ||und|| | ||
| 082 | _A621.68152 N6 | ||
| 100 | _a"Campbell,Stephen A" | ||
| 245 | 4 | _aThe Science and Engineering of Microelectronic Fabrication | |
| 250 | _a1st | ||
| 260 |
_c1996 _b"Oxford,New York" |
||
| 500 | _aYES | ||
| 650 |
_aElectronics _bElectronics |
||
| 942 | _cBK | ||
| 999 |
_c161522 _d161522 |
||