TY  - BOOK
AU  - Ivor Bride
AU  -  Julius J Muray
TI  - The Physics of Micro/Nano Fabrication
SN  - 978-81-8489-413-4
PY  - 2010///
PB  - Springer,New 
KW  - Nano Fabrication
KW  - Nano Technology
N1  - REFERENCE
ER  -