Chang Liu <br/><br/>
Foundations of MEMS 

 - 1 
 -  Pearson Education Internat  2006 
<br/><br/> TRANSFERED 
<br/><br/><label>ISBN: </label>0-13-199204-x 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Foundations of MEMS Electrical 
<br/><br/><label>Dewey Class. No.: </label>